Easy setup, automatic parallel adjustment, complete non-contact gap management. Auto mask aligner with auto-alignment feature. Custom-made options available!
The product is an auto batch equal magnification exposure mask alignment device.
It performs automatic parallel adjustment of the photomask and wafer in a completely non-contact manner.
Equipped with a super-precise UVW drive stage and high-performance image processing, it accurately aligns the photomask and wafer.
It supports both soft and hard contact.
With a lineup tailored to production volume, ranging from manual machines to fully automatic machines, we achieve low prices by handling everything from design to manufacturing and sales in-house.
【Features】
■ Complete non-contact parallel alignment and exposure of photomask and wafer
■ Auto alignment function
■ Easy setup changes, compatible with multiple substrate sizes
■ Space-saving and easy maintenance
■ Achieves low cost and compact design, suitable for small-batch production of various types
■ Equipped with a super-precise UVW stage
*For more details, please refer to the PDF document or feel free to contact us.